B.TECH. IN ELECTRONICS ENGINEERING (VLSI DESIGN AND TECHNOLOGY)coretheorySem 3
MEMS & NEMS TECHNOLOGY
ECE 3226
Syllabus
- 01Historical background of MEMS
- 02Introduction to Micromachining
- 03Bulk micromachining
- 04Surface micromachining
- 05Wafer Bonding
- 06LIGA
- 07Transduction and actuation techniques
- 08Micro sensing for MEMS
- 09Beam and Cantilever
- 10Pressure measurement
- 11Basic Bio-MEMS fabrication technologies
- 12Review of RF based Communication System
- 13MEMS switches
- 14Phase shifters
- 15Microfluidic devices and components for Bio-MEMS
- 16Sensing technologies for Bio-MEMS
- 17Chemical and biomedical microsystems
- 18Introduction to MEMS simulation tool
- 19Need of simulation tool
- 20Case studies on MEMS/Biomes microstructure and their applications
- 21Introduction to Nanotechnology and NEMS
- 22Microfabrication Techniques for NEMS
- 23Mechanical Behavior at Nanoscale
- 24NEMS Device Design and Modeling
- 25Simulation of various MEMS devices using COMSOL Multiphysics
References
- Liu C., Foundations of MEMS, Prentice Hall, 2011.
- Bao M., Analysis and Design Principles of MEMS Devices, Elsevier Science, 2005.
- Senturia S.D., Microsystem Design, Springer, 2001.
- Wang W., Soper S.A., Bio-MEMS-Technologies and Applications, CRC Press, 2007.
- Rebeiz G.M., RF MEMS: Theory, Design, and Technology, John Wiley & Sons, 2003.
- COMSOL (Installed in the Lab)
Credits Structure
3Lecture
0Tutorial
0Practical
3Total